In semiconductor fabrication efficiency and cleanliness are crucial to productivity. Daifuku’s Semiconductor Transport Systems utilize Daifuku’s own HID non-contact voltage induction systems to eliminate particle generation. We offer handling systems for virtually all carriers and sizes.

Used in combination with the Daifuku Semiconductor Storage Systems, our systems can maximize your production efficiency. We have a complete list of transport products that can transport virtually any size materials in any carrier. To eliminate particle generation, our transport systems utilize the Daifuku HID, a non-contact voltage induction system.

200mm Systems

• Cleanway 250 (CLW-250)
• Cleanway 07 (CLW-07)
• Clean Lifter (CLL-40)

300mm Systems

• Cleanway 07 (CLW-07)
• Cleanway 07II (CLW-07II)
• Clean Lifter (CLL-50)