Products by Industry

Zero-Footprint Storage

The Daifuku ZFS-series (Zero-Footprint Storage) enables storage of 300mm FOUPs without use of valuable fab footprint. ZFS storage spaces can be installed to the left, right or below of CLW-07 / 07II Track maximizing the number of shelves possible for a given track segment.

Primary Problems Addressed:

Lack of Fab Footprint
Lack of Storage Locations

Features

No fab footprint required

Can be installed either side of track or below

Benefits

Maximize storage capabilities without using valuable floor space

Applicable Industries:

Semiconductor
Silicon Wafer

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